CTS estimates Chinese fabs hold 343 immersion lithography tools
Image: Primary Chinese chipmakers accumulated an estimated 343 immersion DUV lithography tools from 2012 to early 2026, according to a Centre for Technology & Statecraft report covered by Tom's Hardware. CTS argues that equipment acquired for less advanced chips can be reassigned to make 7nm-class processors despite restrictions on more advanced EUV systems.
CTS proposes banning all immersion DUV exports to China and restricting replacement parts and maintenance at advanced fabs. The process uses repeated patterning steps to produce finer features, at additional cost. How many advanced scanners remain operational is unclear, and Tom's Hardware cautions that some CTS purchase estimates cannot be reconstructed from ASML's financial disclosures.
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